High-Performance a-ITZO TFTs with High Bias Stability Enabled by Self-Aligned Passivation using a-GaO<sub>x</sub>

Presentation information

Oral Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

Thu. Dec 14, 2023 4:30 PM - 6:30 PM Session 11 (Room B-2)

Chair: Katsuhisa Tanaka (Kyoto University), Andreas Klein (Technical University of Darmstadt)

6:15 PM - 6:30 PM

*Yuhao Shi¹, Junghwan Kim^1,2, Hideo Hosono¹ (1. Tokyo Inst. of Tech. (Japan), 2. Ulsan National Inst. of Sci. & Tech. (Korea))

Keywords:Amorphous oxide semiconductors, Gallium oxide, Thin-film transistors, Bias stability, Self-aligned passivation

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