MRM2023/IUMRS-ICA2023

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Poster Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

[D1-P304] Poster 304

Wed. Dec 13, 2023 6:30 PM - 8:30 PM Poster (Annex)

[D1-P304-01] Dip-dry Deposition of Semiconducting Al-O Thin Films

*Masaya Ichimura1, Cheng Baixian1, Tong Li1 (1. Nagoya Institute of Technology (Japan))

Keywords:aluminum oxide, chemical deposition, doping

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