Crystallinity improvement of zinc oxide thin films prepared by reactive high power pulsed magnetron sputtering

Presentation information

Poster Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

Wed. Dec 13, 2023 6:30 PM - 8:30 PM Poster (Annex)

*Md. Suruz Mian¹, Haruki Sato¹, Shun Kondo¹, Takeo Nakano¹ (1. Seikei Univ. (Japan))

Keywords:Vanadium Dioxide, Zinc Oxide, HiPIMS

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