MRM2023/IUMRS-ICA2023

Presentation information

Poster Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

[D1-P304] Poster 304

Wed. Dec 13, 2023 6:30 PM - 8:30 PM Poster (Annex)

[D1-P304-11] Selective growth of vanadium dioxide thin film by controlling discharge voltage in reactive sputtering

*Haruki Sato1, Yuka Kurosaki1, Kosuke Kasugai1, Md. Suruz Mian1, Takeo Nakano1 (1. Seikei Univ. (Japan))

Keywords:Vanadium dioxide (VO2), Discharge voltage, Smart windows

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