Selective growth of vanadium dioxide thin film by controlling discharge voltage in reactive sputtering

Presentation information

Poster Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

Wed. Dec 13, 2023 6:30 PM - 8:30 PM Poster (Annex)

*Haruki Sato¹, Yuka Kurosaki¹, Kosuke Kasugai¹, Md. Suruz Mian¹, Takeo Nakano¹ (1. Seikei Univ. (Japan))

Keywords:Vanadium dioxide (VO2), Discharge voltage, Smart windows

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