MRM2023/IUMRS-ICA2023

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Poster Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

[D1-P304] Poster 304

Wed. Dec 13, 2023 6:30 PM - 8:30 PM Poster (Annex)

[D1-P304-13] Improvement of Hysteresis on As-deposited B-doped In2O3 TFTs under O2 Plasma Exposure

*Shinri Yamadera1, Kanta Kibishi1 (1. Kogakuin Univ. (Japan))

Keywords:B-doped In2O3, As-deposited, TFT, Hysteresis, O2plasma

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