Characteristics of incident particle flux determining growth rates and electrical properties of indium tin oxide films deposited by ion-plating with dc arc discharge

Presentation information

Poster Session

D. Electronic » [D-1] Synthesis, Processing and Characterization of Nanoscale and Functional Oxide Films -7th E-MRS & MRS-J Bilateral Symposium

Wed. Dec 13, 2023 6:30 PM - 8:30 PM Poster (Annex)

*Hisashi Kitami^1,2, Toshiyuki Sakemi¹, Tetsuya Yamamoto² (1. Sumitomo Heavy Industries, Ltd. (Japan), 2. Kochi Univ. of Tech. (Japan))

Keywords:Plasma diagnostics, Ion plating, Arc plasma, Indium Oxide

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