[D1-P304] Poster 304

[D1-P304-14] Characteristics of incident particle flux determining growth rates and electrical properties of indium tin oxide films deposited by ion-plating with dc arc discharge

*Hisashi Kitami^1,2, Toshiyuki Sakemi¹, Tetsuya Yamamoto² (1. Sumitomo Heavy Industries, Ltd. (Japan), 2. Kochi Univ. of Tech. (Japan))

キーワード：Plasma diagnostics, Ion plating, Arc plasma, Indium Oxide