MRM2023/IUMRS-ICA2023

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Oral Session

F. Functional & Structural » [F-3] Reliable Ceramics and Composites

[F3-O403] Oral 403

Thu. Dec 14, 2023 4:30 PM - 6:30 PM Session 16 (Room 501)

Chair: Jelena Maletaskic (Centre of Excellence-CextremeLab Vinca, Institute of Nuclear Sciences, Vinča, University of Belgrade, Belgrade, Serbia)

4:30 PM - 5:00 PM

[F3-O403-01 (Symposium Invited)] Composite and doped non-oxide ceramic films with tunable properties by laser chemical vapor deposition

*Hirokazu Katsui1, Kazuya Shimoda2, Katsuyoshi Harada3, jun Kumagai3, Mikinori Hotta1 (1. National Institute of Advanced Industrial Science and Technology (AIST) (Japan), 2. National Institute for Material Science (NIMS) (Japan), 3. Nagoya University (Japan))

Keywords:Chemical vapor deposition, silicon carbide, tantalum carbonitride, boron nitride, nanocomposite

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