[F3-O403] Oral 403

[F3-O403-01 (Symposium Invited)] Composite and doped non-oxide ceramic films with tunable properties by laser chemical vapor deposition

*Hirokazu Katsui¹, Kazuya Shimoda², Katsuyoshi Harada³, jun Kumagai³, Mikinori Hotta¹ (1. National Institute of Advanced Industrial Science and Technology (AIST) (Japan), 2. National Institute for Material Science (NIMS) (Japan), 3. Nagoya University (Japan))

キーワード：Chemical vapor deposition, silicon carbide, tantalum carbonitride, boron nitride, nanocomposite