[G-L504] Late Breaking News

[G-L504-07] Size control of Si nanoparticles by in-reactor axial flow cyclone in RF plasma spraying

*Masashi Dougakiuchi¹, Toshimi Tanaka², Akira Takeuchi², Kenichi Fukuda¹, Makoto Kambara³ (1. Shimane Institute for Industrial Technology (Japan), 2. Takeuchi Electric Co. Ltd. (Japan), 3. Osaka Univ. (Japan))

キーワード：Si nanoparticles, Plasma flash evaporation, CFD