MRM2023/IUMRS-ICA2023

Presentation information

Oral Session

G. Process » [G-1] Advanced Plasma Processing in the New Era

[G1-O402] Oral 402

Thu. Dec 14, 2023 2:00 PM - 4:00 PM Session 13 (Room I)

Chair: Manabu Tanaka (Kyushu Univ.)

3:15 PM - 3:30 PM

[G1-O402-04] Plasma assisted formation of nano catalysts for the high-density growth of carbon nanotube forests and its device applications

*Hiroshi Furuta1,2, Taichi Marui1, Rebekah Arias3, Yuto Sawada1, Ryuichi Shinsei1, Nobuyuki Kameoka1, Tomu Yamamoto1, Kenshin Sakata1, Ryosuke Ooe1, Hokuto Sakoda1, Nathan Chung3, Nezih Pala3, Chunlei Wang3 (1. School of Systems Eng., Kochi Univ. Tech. (Japan), 2. Res. Inst., Kochi Univ. Tech. (Japan), 3. Florida Int'l. Univ. (United States of America))

Keywords:Sputtering Deposition, Catalyst Film, Nano Particles, Carbon Nanotubes, Metamaterial, Solar Absorber

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