[G1-O502] Oral 502

[G1-O502-02] Fabrication of ZnO Based Transparent Conducting Oxide as an Alternative to In₂O₃:Sn by Sputtering Combined with Solid Phase Crystallization

*Naho Itagaki¹, Zhiyuan Shen¹, Yoshiharu Wada¹, Hisato Yabuta¹, Naoto Yamashita¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Kazunori Koga¹, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan))

Keywords:ZnO, transparent conducting oxide, sputtering, solid phase crystallization, nucleation