Fabrication of ZnO Based Transparent Conducting Oxide as an Alternative to In<sub>2</sub>O<sub>3</sub>:Sn by Sputtering Combined with Solid Phase Crystallization

Naho Itagaki

14:30 〜 14:45

[G1-O502-02] Fabrication of ZnO Based Transparent Conducting Oxide as an Alternative to In₂O₃:Sn by Sputtering Combined with Solid Phase Crystallization

*Naho Itagaki¹, Zhiyuan Shen¹, Yoshiharu Wada¹, Hisato Yabuta¹, Naoto Yamashita¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Kazunori Koga¹, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan))

キーワード：ZnO, transparent conducting oxide, sputtering, solid phase crystallization, nucleation

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講演情報

[G1-O502] Oral 502

[G1-O502-02] Fabrication of ZnO Based Transparent Conducting Oxide as an Alternative to In₂O₃:Sn by Sputtering Combined with Solid Phase Crystallization

講演情報

[G1-O502] Oral 502

[G1-O502-02] Fabrication of ZnO Based Transparent Conducting Oxide as an Alternative to In2O3:Sn by Sputtering Combined with Solid Phase Crystallization

[G1-O502-02] Fabrication of ZnO Based Transparent Conducting Oxide as an Alternative to In₂O₃:Sn by Sputtering Combined with Solid Phase Crystallization