MRM2023/IUMRS-ICA2023

Presentation information

Print

Oral Session

G. Process » [G-1] Advanced Plasma Processing in the New Era

[G1-O502] Oral 502

Fri. Dec 15, 2023 2:00 PM - 4:30 PM Session 13 (Room I)

Chair: Osamu Sakai (Univ. Shiga Pref.)

4:00 PM - 4:15 PM

[G1-O502-06] Hybrid machine learning model prediction for high mobility amorphous ITO films fabricated by RF plasma sputtering

*Kunihiro KAMATAKI1, Naho Itagaki1, Daisuke Yamashita1, Takamasa Okumura1, Naoto Yamashita1, Kazunori Koga1, Masaharu Shiratani1 (1. Kyushu Univ. (Japan))

Keywords:machine learning, plasma process, amorphous ITO, SVM, GBRT

Please log in with your participant account.
» Participant Log In