Hybrid machine learning model prediction for high mobility amorphous ITO films fabricated by RF plasma sputtering

Kunihiro KAMATAKI

16:00 〜 16:15

[G1-O502-06] Hybrid machine learning model prediction for high mobility amorphous ITO films fabricated by RF plasma sputtering

*Kunihiro KAMATAKI¹, Naho Itagaki¹, Daisuke Yamashita¹, Takamasa Okumura¹, Naoto Yamashita¹, Kazunori Koga¹, Masaharu Shiratani¹ (1. Kyushu Univ. (Japan))

キーワード：machine learning, plasma process, amorphous ITO, SVM, GBRT

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講演情報

[G1-O502] Oral 502

[G1-O502-06] Hybrid machine learning model prediction for high mobility amorphous ITO films fabricated by RF plasma sputtering