MRM2023/IUMRS-ICA2023

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Oral Session

G. Process » [G-1] Advanced Plasma Processing in the New Era

[G1-O502] Oral 502

Fri. Dec 15, 2023 2:00 PM - 4:30 PM Session 13 (Room I)

Chair: Osamu Sakai (Univ. Shiga Pref.)

4:15 PM - 4:30 PM

[G1-O502-07] Evaluation of Elastic Parameters of a-C:H Film with Carbon Nanoparticles Using Nanoindentation Method

*Kazunori Koga1, Shinjiro Ono1, Manato Eri1, Takamasa Okumura1, Kunihiro Kamataki1, Naoto Yamashita1, Naho Itagaki1, Masaharu Shiratani1 (1. Kyushu University (Japan))

Keywords:Hydrogenated amorphous carbon, Carbon nanoparticle, Nanoindentation

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