MRM2023/IUMRS-ICA2023

Presentation information

Poster Session

G. Process » [G-1] Advanced Plasma Processing in the New Era

[G1-P501] Poster 501

Fri. Dec 15, 2023 10:00 AM - 12:00 PM Poster (Annex)

[G1-P501-01] Laser Induced Fluorescent Observation of NH radicals in Dielectric Barrier Dischargefor Nitriding Treatment

*Saki Wakabayashi1, Masato Ueda1, Amane Takeda1, Ryuta Ichiki1, Kosuke Tachibana1, Takashi Huruki1, Seiji Kanazawa1 (1. Oita Univ. (Japan))

Keywords:nitriding, dielectric barrier discharge, NH radical, laser induced fluorescence

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