[G1-P501] Poster 501

[G1-P501-03] Raman mapping of DLC films using the HF-HiPIMS method to investigate the sp² cluster model

*Hiroyuki Fukue¹, Tatsuyuki Nakatani¹, Tadayuki Okano², Masahide Kuroiwa², Shinsuke Kunitsugu³, Susumu Takabayashi⁴, Hiroki Oota⁵, Ken Yonezawa^5,1 (1. Okayama Univ. of Sci. (Japan), 2. Tokyo Electronics Co., Ltd. (Japan), 3. Ind. Technol. Cent. Okayama Pref. (Japan), 4. National Inst. Technol., Ariake College (Japan), 5. Kenix Corporation (Japan))

Keywords:mapping, Raman spectroscopy, DLC, HiPIMS, plasma process