[G1-P501] Poster 501

[G1-P501-03] Raman mapping of DLC films using the HF-HiPIMS method to investigate the sp² cluster model

*Hiroyuki Fukue¹, Tatsuyuki Nakatani¹, Tadayuki Okano², Masahide Kuroiwa², Shinsuke Kunitsugu³, Susumu Takabayashi⁴, Hiroki Oota⁵, Ken Yonezawa^5,1 (1. Okayama Univ. of Sci. (Japan), 2. Tokyo Electronics Co., Ltd. (Japan), 3. Ind. Technol. Cent. Okayama Pref. (Japan), 4. National Inst. Technol., Ariake College (Japan), 5. Kenix Corporation (Japan))

キーワード：mapping, Raman spectroscopy, DLC, HiPIMS, plasma process