[G1-P501] Poster 501

[G1-P501-06] Clover-Flower-Like Carbon Produced by RF Magnetron Sputtering

*Yudai Tokito¹, Yuta Sasaki², Soichiro Koga², Masami Aono¹ (1. Electrical and Electronics Engineering Program, Graduate School of Sci. and Engineering, Kagoshima Univ. (Japan), 2. Electrical and Electronics Engineering Program, Faculty of Engineering, Kagoshima Univ. (Japan))

Keywords:carbon, sputtering, SEM, micro structure, carbon sphere