[G1-P501] Poster 501

[G1-P501-06] Clover-Flower-Like Carbon Produced by RF Magnetron Sputtering

*Yudai Tokito¹, Yuta Sasaki², Soichiro Koga², Masami Aono¹ (1. Electrical and Electronics Engineering Program, Graduate School of Sci. and Engineering, Kagoshima Univ. (Japan), 2. Electrical and Electronics Engineering Program, Faculty of Engineering, Kagoshima Univ. (Japan))

キーワード：carbon, sputtering, SEM, micro structure, carbon sphere