Multi-Purpose Plasma Monitoring by Sensor Devices Connected with Wireless Communication

Presentation information

Poster Session

G. Process » [G-1] Advanced Plasma Processing in the New Era

Fri. Dec 15, 2023 10:00 AM - 12:00 PM Poster (Annex)

*Osamu Sakai¹, Yohei Sanami¹, Kota Hamano¹, Yuji Kasashima², Tatsuo Tabaru² (1. Univ. Shiga Pref. (Japan), 2. AIST (Japan))

Keywords:Plasma Processing, Sensor, Wireless communication

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