[G2-P504] Poster 504

[G2-P504-11] High Throughput Ti Spherical Particle Production Using Inverter Type
100kW Class High Frequency Plasma System

*Akira Takeuchi¹, Toshimi Tanaka¹, Masashi Dougakiuchi², Kenichi Fukuda², Makoto Kambara³ (1. Takeuchi Electric Co., Ltd. (Japan), 2. Shimane Institute for Industrial Technology (Japan), 3. Division of Materials and Manufacturing Science, Osaka University (Japan))

キーワード：High-frequency plasma, inverter power supply, particle modification, CAE