[G3-P504] Poster 504

[G3-P504-01] Characterization and Evaluation of Vacuum Plasma Spray Coating with Y2O3 or MgO-based compounds for Plasma Etching Resistivity

*Sunghun Lee¹, Yong-jin Kang ¹, Han-sol Kwon¹, Young-jin Park¹, Yeon-woo Yoo¹ (1. Korea Inst. of Materials Sci. (Korea))

キーワード：plasma etching resistant coating, thermal spray, suspension vacuum plasma spray