MRM2023/IUMRS-ICA2023

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Oral Session

G. Process » [G-4] Advanced smart processing

[G4-O503] Oral 503

Fri. Dec 15, 2023 4:20 PM - 6:30 PM Session 3 (Room157)

Chair: Naonori Sakamoto (Shizuoka University), Yiwen Zhang (Tianjin University)

5:47 PM - 6:00 PM

[G4-O503-06] Vacuum-ultraviolet-light irradiation induced phase transition of
Cobalt oxide epitaxial films at room-temperature

*Kenta Kaneko1, Yuchi Qiao1, Satoru Kaneko2,1, Mamoru Yoshimoto1, Akifumi Matsuda1 (1. Tokyo Inst. of Tech. (Japan), 2. Kanagawa Inst. of Indus. Sci. and Tech. (Japan))

Keywords:Cobalt oxide, Epitaxial film, Vacuum-ultraviolet-light, Topotactic reaction, Low-temperature process

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