[G4-O503] Oral 503

[G4-O503-06] Vacuum-ultraviolet-light irradiation induced phase transition of
Cobalt oxide epitaxial films at room-temperature

*Kenta Kaneko¹, Yuchi Qiao¹, Satoru Kaneko^2,1, Mamoru Yoshimoto¹, Akifumi Matsuda¹ (1. Tokyo Inst. of Tech. (Japan), 2. Kanagawa Inst. of Indus. Sci. and Tech. (Japan))

キーワード：Cobalt oxide, Epitaxial film, Vacuum-ultraviolet-light, Topotactic reaction, Low-temperature process