MRM2023/IUMRS-ICA2023

Presentation information

Poster Session

G. Process » [G-4] Advanced smart processing

[G4-P401] Poster 401

Thu. Dec 14, 2023 10:00 AM - 12:00 PM Poster (Annex)

[G4-P401-01] High-Speed Continuous Wave Laser Annealing: Non-equilibrium growth of Highly-Strained Germanium-Based Materials

*Ryo Matsumura1, Rahmat Hadi Saputro1,2, Naoki Fukata1,2 (1. NIMS (Japan), 2. Univ. of Tsukuba (Japan))

Keywords:Laser Annealing, Germanium, Thin film

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