MRM2023/IUMRS-ICA2023

Presentation information

Poster Session

G. Process » [G-4] Advanced smart processing

[G4-P401] Poster 401

Thu. Dec 14, 2023 10:00 AM - 12:00 PM Poster (Annex)

[G4-P401-13] Fabrication of uniaxially oriented β-Ga2O3 thin films on flexible polymer substrates by UV laser annealing at room temperature

*Ryoya Kai1, Tomoaki Oga1, Satoru Kaneko1,2, Mamoru Yoshimoto1, Akifumi Matsuda1 (1. Tokyo Inst. of Tech. (Japan), 2. Kanagawa Inst. of Indus. Sci. and Tech. (Japan))

Keywords:Wide-bandgap semiconductor, Gallium oxide, Excimer laser annealing

Please log in with your participant account.
» Participant Log In