[G4-P401] Poster 401

[G4-P401-13] Fabrication of uniaxially oriented β-Ga₂O₃ thin films on flexible polymer substrates by UV laser annealing at room temperature

*Ryoya Kai¹, Tomoaki Oga¹, Satoru Kaneko^1,2, Mamoru Yoshimoto¹, Akifumi Matsuda¹ (1. Tokyo Inst. of Tech. (Japan), 2. Kanagawa Inst. of Indus. Sci. and Tech. (Japan))

Keywords:Wide-bandgap semiconductor, Gallium oxide, Excimer laser annealing