Vapor-phase chemical etching of silicon assisted by thin MoS<sub>2</sub> crystals

Presentation information

Poster Session

G. Process » [G-4] Advanced smart processing

Thu. Dec 14, 2023 10:00 AM - 12:00 PM Poster (Annex)

*Kaichi Yamamoto¹, Toru Utsunomiya¹, Takashi Ichii¹, Hiroyuki Sugimura¹ (1. Kyoto Univ. (Japan))

Keywords:silicon, MoS2, etching

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