MRM2023/IUMRS-ICA2023

Presentation information

Oral Session

S. Co-Sponsored Topics » [S-2] 9th International Symposium on Transparent Conductive Materials & 13th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics (TCM-TOEO 2023)

[S2-O202] Oral 202

Tue. Dec 12, 2023 2:00 PM - 4:00 PM Session 1 (Room C-1)

Chair: Daniel Gloess (Fraunhofer FEP), David Samuel Ginley (NREL)

3:00 PM - 3:15 PM

[S2-O202-03] Strong Dependence of Solid-Phase Crystallization Atmosphere on the Performance of In2O3:H Thin Film Transistors

*Yusaku Magari1, Prashant Ghediya1, Yuqiao Zhang2,3, Yasutaka Matsuo1, Mamoru Furuta4, Hiromichi Ohta1 (1. Hokkaido Univ. (Japan), 2. Jiangsu Univ. (China), 3. Foshan Instit. for New Materials (China), 4. Kochi Univ. of Tech. (Japan))

Keywords:In2O3:H, Solid-phase crystallization, Thin film transistors, High mobility

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