MRM2023/IUMRS-ICA2023

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Oral Session

S. Co-Sponsored Topics » [S-2] 9th International Symposium on Transparent Conductive Materials & 13th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics (TCM-TOEO 2023)

[S2-O203] Oral 203

Tue. Dec 12, 2023 4:30 PM - 6:30 PM Session 1 (Room C-1)

Chair: Julia E Medvedeva (Missouri S&T), KIN MAN Yu (City University of Hong Kong)

6:15 PM - 6:30 PM

[S2-O203-04] Low resistivity ZnO transparent films on polymer substrates by Modified Sputtering Method

*Yasuji Yamada1, Toya Shirasu1, Yugo Tamai1, Shuhei Funaki1 (1. Shimane Univ. (Japan))

Keywords:Thin film, PET, Target, Electrode

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