MRM2023/IUMRS-ICA2023

Presentation information

Oral Session

S. Co-Sponsored Topics » [S-2] 9th International Symposium on Transparent Conductive Materials & 13th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics (TCM-TOEO 2023)

[S2-O303] Oral 303

Wed. Dec 13, 2023 4:30 PM - 6:30 PM Session 1 (Room C-1)

Chair: Xuedong Bai (Institute of Physics, Chinese Academy of Sciences), Marius Grundmann (Universität Leipzig)

5:00 PM - 5:15 PM

[S2-O303-02] Scalable, Near Room Temperature Processed Indium Oxide and Tellurium Ultrathin Films for Complementary Metal-Oxide Semiconductor Electronics

*Chun Yuen Ho1,2,3, I. K. M. Reaz Rahman1,2, Shu Wang1,2,4, Morten Madsen3, Ali Javey1,2 (1. Electrical Engineering and Computer Sciences, Univ. of California, Berkeley (United States of America), 2. Materials Sciences Division, Lawrence Berkeley National Lab. (United States of America), 3. Centre for Advanced Photovoltaics and Thin-Film Energy Devices, Mads Clausen Inst., Univ. of Southern Denmark (Denmark), 4. Department of Materials Sci. and Engineering, Univ. of California, Berkeley (United States of America))

Keywords:complementary metal-oxide semiconductor, indium oxide, tellurium, Gaussian heterojunction transistor

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