Structural and optical properties of niobium oxide films deposited by the specially designed reactive sputtering system.

Yuzo Shigesato

Presentation information

Poster Session

S. Co-Sponsored Topics » [S-2] 9th International Symposium on Transparent Conductive Materials & 13th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics (TCM-TOEO 2023)

[S2-P304] Poster 304

Wed. Dec 13, 2023 6:30 PM - 8:30 PM Poster (Annex)

[S2-P304-08] Structural and optical properties of niobium oxide films deposited by the specially designed reactive sputtering system.

*Yuzo Shigesato¹, Mai Saito¹, Junjun Jia², Daniel Gloess³ (1. Aoyama Gakuin University (Japan), 2. Waseda University (Japan), 3. Fraunhofer-Institut für Organische Elektronik, Elektronenstrahl- und Plasmatechnik (Germany))

Keywords:niobium oxide, reactive sputtering, plasma emission monitoring system, transition region, optical bandgap

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