MRM2023/IUMRS-ICA2023

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Poster Session

S. Co-Sponsored Topics » [S-2] 9th International Symposium on Transparent Conductive Materials & 13th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics (TCM-TOEO 2023)

[S2-P304] Poster 304

Wed. Dec 13, 2023 6:30 PM - 8:30 PM Poster (Annex)

[S2-P304-10] Gas sensing properties of WO3 films deposited by reactive rf sputtering

*Keita Yoshida1, Makoto Kashiwagi1, Yuki Oguchi1, Akira Nakamura2, Yuzo Shigesato1 (1. Aoyama Gakuin Univ. (Japan), 2. Minebea Mitsumi Inc. (Japan))

Keywords:WO3 film, gas sensor, ethanol gas sensing, acetone gas sensing, reactive rf sputtering

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