Temperature dependence of thermal conductivity of amorphous aluminum oxide thin films with different densities

Makoto Kashiwagi

Presentation information

Poster Session

S. Co-Sponsored Topics » [S-2] 9th International Symposium on Transparent Conductive Materials & 13th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics (TCM-TOEO 2023)

[S2-P304] Poster 304

Wed. Dec 13, 2023 6:30 PM - 8:30 PM Poster (Annex)

[S2-P304-15] Temperature dependence of thermal conductivity of amorphous aluminum oxide thin films with different densities

*Makoto Kashiwagi^1,2, Naoki Noda¹, Yuichiro Yamashita^3,1, Takashi Yagi^3,1, Yuki Oguchi¹, Naoyuki Taketoshi^3,1, Yuzo Shigesato¹ (1. Aoyama Gakuin Univ. (Japan), 2. Japan Sci. and Tech. Agency (Japan), 3. National Inst. of Advanced Indus. Sci. and Tech. (Japan))

Keywords:amorphous, heat transport, thermoreflectance, 3ω method, temperature dependence of thermal conductivity

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