[S2-P304] Poster 304

[S2-P304-15] Temperature dependence of thermal conductivity of amorphous aluminum oxide thin films with different densities

*Makoto Kashiwagi^1,2, Naoki Noda¹, Yuichiro Yamashita^3,1, Takashi Yagi^3,1, Yuki Oguchi¹, Naoyuki Taketoshi^3,1, Yuzo Shigesato¹ (1. Aoyama Gakuin Univ. (Japan), 2. Japan Sci. and Tech. Agency (Japan), 3. National Inst. of Advanced Indus. Sci. and Tech. (Japan))

キーワード：amorphous, heat transport, thermoreflectance, 3ω method, temperature dependence of thermal conductivity