MRM2023/IUMRS-ICA2023

講演情報

Poster Session

S. Co-Sponsored Topics » [S-2] 9th International Symposium on Transparent Conductive Materials & 13th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics (TCM-TOEO 2023)

[S2-P304] Poster 304

2023年12月13日(水) 18:30 〜 20:30 Poster (Annex)

[S2-P304-36] Effect of Target Density on Film properties of Al-doped Zinc Oxide Thin Films: A Comparative Study between Powder and Bulk Targets in Sputtering Deposition

*Tamiko Ohshima1, Yohinobu Matsuda1, Hiroharu Kawasaki2, Yusuke Hibino2, Takeshi Ihara2, Yoshihito Yagyu2, Takahiko Satake3, Shin-ichi Aaoqui3 (1. Nagasaki Univ. (Japan), 2. National Inst. Tech., Sasebo Cllog. (Japan), 3. Sojo Univ. (Japan))

キーワード:Powder target, Bulk target, Sputtering, Thin films

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