[S2-P304] Poster 304

[S2-P304-36] Effect of Target Density on Film properties of Al-doped Zinc Oxide Thin Films: A Comparative Study between Powder and Bulk Targets in Sputtering Deposition

*Tamiko Ohshima¹, Yohinobu Matsuda¹, Hiroharu Kawasaki², Yusuke Hibino², Takeshi Ihara², Yoshihito Yagyu², Takahiko Satake³, Shin-ichi Aaoqui³ (1. Nagasaki Univ. (Japan), 2. National Inst. Tech., Sasebo Cllog. (Japan), 3. Sojo Univ. (Japan))

キーワード：Powder target, Bulk target, Sputtering, Thin films