Effect of Target Density on Film properties of Al-doped Zinc Oxide Thin Films: A Comparative Study between Powder and Bulk Targets in Sputtering Deposition

Tamiko Ohshima

Presentation information

Poster Session

S. Co-Sponsored Topics » [S-2] 9th International Symposium on Transparent Conductive Materials & 13th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics (TCM-TOEO 2023)

[S2-P304] Poster 304

Wed. Dec 13, 2023 6:30 PM - 8:30 PM Poster (Annex)

[S2-P304-36] Effect of Target Density on Film properties of Al-doped Zinc Oxide Thin Films: A Comparative Study between Powder and Bulk Targets in Sputtering Deposition

*Tamiko Ohshima¹, Yohinobu Matsuda¹, Hiroharu Kawasaki², Yusuke Hibino², Takeshi Ihara², Yoshihito Yagyu², Takahiko Satake³, Shin-ichi Aaoqui³ (1. Nagasaki Univ. (Japan), 2. National Inst. Tech., Sasebo Cllog. (Japan), 3. Sojo Univ. (Japan))

Keywords:Powder target, Bulk target, Sputtering, Thin films

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