[S2-P304] Poster 304

[S2-P304-37] Fabrication and application of high-efficiency BDD thin film by HFCVD

*Songhyeon Lee¹, Miyoung You¹, Pungkeun Song¹ (1. Dept. of Materials Sci. and Eng., Pusan National Univ. (Korea))

キーワード：Hot Filament Chemical Vapor Deposition (HFCVD), Boron Doped Diamond (BDD), Hight quality electrode