[G1-O502] Oral 502

[G1-O502-07] Evaluation of Elastic Parameters of a-C:H Film with Carbon Nanoparticles Using Nanoindentation Method

*Kazunori Koga¹, Shinjiro Ono¹, Manato Eri¹, Takamasa Okumura¹, Kunihiro Kamataki¹, Naoto Yamashita¹, Naho Itagaki¹, Masaharu Shiratani¹ (1. Kyushu University (Japan))

キーワード：Hydrogenated amorphous carbon, Carbon nanoparticle, Nanoindentation