[ME2] Waveguide Devices

[ME2-3] Horizontal Slot Waveguides with Strong Optical Confinement in Low Refractive Index Oxide Films

〇Xuejun Xu, Tomohiro Inaba, Takehiko Tawara, Hiroo Omi, Hideki Gotoh (NTT Corporation, Japan)

キーワード：Si photonic and heterogeneous platform, Emerging materials and fabrication method for passive photonic platforms, Novel materials and structures

As fundamental building blocks for integrated photonic devices based on functional oxides, horizontal slot waveguides with an optical confinement factor as large as 66% in low refractive index oxide films have been designed and demonstrated.