[TuP4-E] Poster Session 1

[TuP4-E4] A Fishbone-shape On-chip Antenna Structure Based on Silicon Nitride Photonics

〇Bo Yang^1,2, Hongwei Chen^1,2, Sigang Yang^1,2, Zunlong Liu³, Qiang Geng³, Minghua Chen^1,2 (¹Tsinghua Univ., China, ²Beijing National Research Center for Information Science and Technology, China, ³Beijing Huahang Radio Measurement Institute, China)

Keywords:Photonic Integration

A fishbone-shape on-chip antenna structure based on 200nm thick silicon nitride platform is proposed, which can be fabricated by simple fabrication process. Two high-efficiency antennas based on this structure are shown in this paper.