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[WP4-D6] Template Thickness Dependence of GaInAsP MQW Laser Diode Grown on Directly Bonded InP/Si Substrate
キーワード:Si photonic and heterogeneous platform
We have fabricated MQW LD grown on directly bonded InP/Si substrate using MOVPE where the thickness of InP template was 1.0μm and 1.5μm. We have compared the lasing characteristics by the difference of template thickness.
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