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[WP4-E1] Significant Propagation Loss Reduction on Silicon High-Mesa Waveguides Using Thermal Oxidation Technique
キーワード:Photonic integrated circuits
We have exploited thermal oxidation technique to silicon high-mesa waveguides for sensing-application. Significant propagation loss reduction from 1.45 to 0.84 dB/cm at a waveguide width of 500 nm has been achieved by the technique successfully.
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