[WP4-E] Poster Session 2

[WP4-E3] Fabrication of Nb₂O₅ Horizontal Slot Waveguide Structures

〇Yoshiki Hayama, Shinta Uchibori, Katsumi Nakatsuhara, Masayuki Takeda, Takeshi Nishizawa (Kanagawa Institute of Technology, Japan)

Keywords:Micro- and nano-optics and related devices

We propose a fabrication process for Nb₂O₅ horizontal slot waveguides using a thin film deposition and selective etching technique. We have also fabricated a horizontal slot structure as a preliminary experiment.