OPTICS & PHOTONICS International Congress 2019

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ALPS2019

Oral Presentation

Measurements and applications of high intensity lasers

Wed. Apr 24, 2019 11:00 AM - 12:00 PM 303 (Pacifico Yokohama Conference Center)

Session Chair:Pavel Bakule(Institute of Physics of the Czech Academy of Sciences, ELI Beamlines)

11:45 AM - 12:00 PM

[ALPS-13-04] Time-resolved imaging of photoresist stripping dynamics induced by laser irradiation

*Naoki Nishioka1,2, Yuji Umeda1, Daichi Shima1, Ono Koichi1, Tomosumi Kamimura1, Hideo Horibe2, Masashi Yoshimura3, Ryosuke Nakamura3 (1. Osaka Institute of Technology, 2. Osaka City University, 3. Osaka University)