OPTICS & PHOTONICS International Congress 2019

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ALPS2019

Poster Presentation

Poster Session 1

Wed. Apr 24, 2019 1:15 PM - 2:45 PM Hall A (Pacifico Yokohama Exhibition Hall)

1:15 PM - 2:45 PM

[ALPS-P1-24] Short Pulse Light Source at 193nm for Hybrid ArF Laser

*Yuuki Tamaru1, Hironori Igarashi1, Chen Qu1, Atsushi Fuchimukai1, Yoshihiko Murakami1, Yasuhiro Kamba1, Taisuke Miura1, Junichi Fujimoto1, Hakaru Mizoguchi1 (1. Gigaphoton Inc.)