OPTICS & PHOTONICS International Congress 2019

講演情報

印刷

ALPS2019

Poster Presentation

Poster Session 1

2019年4月24日(水) 13:15 〜 14:45 Hall A (Pacifico Yokohama Exhibition Hall)

13:15 〜 14:45

[ALPS-P1-24] Short Pulse Light Source at 193nm for Hybrid ArF Laser

*Yuuki Tamaru1, Hironori Igarashi1, Chen Qu1, Atsushi Fuchimukai1, Yoshihiko Murakami1, Yasuhiro Kamba1, Taisuke Miura1, Junichi Fujimoto1, Hakaru Mizoguchi1 (1. Gigaphoton Inc.)